Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10523905 | Substrate imaging apparatus | Norihisa Koga, Tadashi Nishiyama | 2019-12-31 |
| 10381221 | Substrate processing method, substrate processing apparatus and a computer-readable storage medium | Tadashi Nishiyama | 2019-08-13 |