Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10502508 | System including temperature-controllable stage, semiconductor manufacturing equipment and stage temperature control method | — | 2019-12-10 |
| 10475686 | Stage, stage manufacturing method, and heat exchanger | — | 2019-11-12 |
| 10312062 | Temperature control system and temperature control method | — | 2019-06-04 |