Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10513777 | Film formation device | Masahide Iwasaki, Satoshi Yonekura | 2019-12-24 |
| 10370763 | Plasma processing apparatus | Takahiro HIRANO, Takaaki Kato | 2019-08-06 |
| 10347466 | Plasma processing apparatus | Takahiro HIRANO | 2019-07-09 |