TK

Tatsuya Kawaji

TL Tokyo Electron Limited: 1 patents #275 of 763Top 40%
Overall (2019): #253,073 of 560,194Top 50%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10217652 Heat treatment apparatus, heat treatment method, and storage medium Masato Mizuta, Keigo Nakano 2019-02-26