Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10325758 | Plasma processing apparatus | Jun Yamawaku, Chishio Koshimizu | 2019-06-18 |
| 10283328 | Plasma processing apparatus and plasma processing method | Jun Yamawaku, Chishio Koshimizu | 2019-05-07 |
| 10184786 | Wear amount measuring apparatus and method, temperature measuring apparatus and method and substrate processing system | — | 2019-01-22 |