Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483137 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium | Hiroyuki Masutomi, Toshiyuki Shiokawa, Koji Tanaka | 2019-11-19 |
| 10276408 | Flow-rate regulator device, diluted chemical-liquid supply device, liquid processing apparatus and its operating system | Michitaka Amiya, Kazuyoshi Eshima, Akihiro Nakamura, Koji Tanaka, Kazuki Kosai | 2019-04-30 |