Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504803 | Substrate processing system, control device, and film deposition method and program | Yuichi Takenaga | 2019-12-10 |
| 10395934 | Control device, substrate processing system, substrate processing method, and program | Yuichi Takenaga | 2019-08-27 |