Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475665 | Heating method, film forming method, semiconductor device manufacturing method, and film forming apparatus | Hiroki Murakami | 2019-11-12 |
| 10312078 | Nitride film forming method and storage medium | Hiroki Murakami, Daisuke Suzuki | 2019-06-04 |
| 10304676 | Method and apparatus for forming nitride film | Daisuke Suzuki, Hiroki Murakami | 2019-05-28 |