Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403814 | Method of cleaning and method of plasma processing | Takuya Kubo, Keiichi Shimoda, Tetsuya Ohishi | 2019-09-03 |
| 10181559 | Etching method | Takuya Kubo | 2019-01-15 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403814 | Method of cleaning and method of plasma processing | Takuya Kubo, Keiichi Shimoda, Tetsuya Ohishi | 2019-09-03 |
| 10181559 | Etching method | Takuya Kubo | 2019-01-15 |