Issued Patents 2019
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515814 | Method of quasi-atomic layer etching of silicon nitride | Alok Ranjan | 2019-12-24 |
| 10446407 | Method of preferential silicon nitride etching using sulfur hexafluoride | Alok Ranjan | 2019-10-15 |
| 10446405 | Method of anisotropic extraction of silicon nitride mandrel for fabrication of self-aligned block structures | Alok Ranjan | 2019-10-15 |
| 10431470 | Method of quasi-atomic layer etching of silicon nitride | Alok Ranjan | 2019-10-01 |
| 10381235 | Method of selective silicon nitride etching | Alok Ranjan, Vinayak Rastogi | 2019-08-13 |
| 10373828 | Method of sidewall image transfer | Alok Ranjan | 2019-08-06 |
| 10312102 | Method of quasi-atomic layer etching of silicon nitride | Alok Ranjan | 2019-06-04 |
| 10304688 | Method of quasi-atomic layer etching of silicon nitride | Alok Ranjan | 2019-05-28 |
| 10192743 | Method of anisotropic extraction of silicon nitride mandrel for fabrication of self-aligned block structures | Alok Ranjan | 2019-01-29 |