SM

Shunichi Mikami

TL Tokyo Electron Limited: 2 patents #91 of 763Top 15%
📍 Rifu, JP: #46 of 288 inventorsTop 20%
Overall (2019): #120,801 of 560,194Top 25%
2
Patents 2019

Issued Patents 2019

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10290510 Plasma etching method, pattern forming method and cleaning method 2019-05-14
10283368 Plasma etching method and plasma etching apparatus 2019-05-07