Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490392 | Focus ring replacement method and plasma processing system | — | 2019-11-26 |
| 10468278 | Substrate transfer method and substrate processing apparatus | — | 2019-11-05 |
| 10403525 | Substrate processing method and substrate processing system | Toru Nishino, Kiyohito Iijima | 2019-09-03 |