Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10351084 | Power supply control system | Akinori Maruyama, Shuuji Satake, Yoshinori Ikuta, Yoshihide Nakamura, Yasuyuki Shigezane | 2019-07-16 |
| 10217628 | Substrate processing apparatus and processing method of substrate processing apparatus | Yoshifumi Amano, Ryoji Ikebe, Isamu Miyamoto | 2019-02-26 |