Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10424499 | Apparatus, method and non-transitory storage medium for accommodating and processing a substrate | Akihiro Matsumoto, Michiaki Matsushita, Kazunori Kuratomi | 2019-09-24 |