Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418258 | Mounting table temperature control device and substrate processing apparatus | — | 2019-09-17 |
| 10408417 | Light-emitting device with light flux control member having prismatic elements on bottom surface forming acute angle with side edge of light source | Yasuyuki Fukuda | 2019-09-10 |