Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10519548 | Film forming apparatus | — | 2019-12-31 |
| 10392698 | Film forming method, film forming system and surface processing method | Miyako Kaneko, Tsuyoshi Takahashi, Kazuyoshi Yamazaki | 2019-08-27 |