Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10191378 | Mask pattern forming method, fine pattern forming method, and film deposition apparatus | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2019-01-29 |
| 10176992 | Mask pattern forming method, fine pattern forming method, and film deposition apparatus | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2019-01-08 |