Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10304725 | Manufacturing methods to protect ULK materials from damage during etch processing to obtain desired features | Xinghua Sun, Takashi Yamamura, Hiroyuki Nagai, Ryuichi Asako | 2019-05-28 |