Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410873 | Power modulation for etching high aspect ratio features | Takuya Mori | 2019-09-10 |
| 10381238 | Process for performing self-limited etching of organic materials | Takahito Mukawa | 2019-08-13 |
| 10340123 | Multi-frequency power modulation for etching high aspect ratio features | — | 2019-07-02 |