Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472719 | Nozzle and substrate processing apparatus using same | Yu Wamura, Fumiaki Hayase, Masahiko Kaminishi, Kosuke Takahashi, Yu Sasaki | 2019-11-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472719 | Nozzle and substrate processing apparatus using same | Yu Wamura, Fumiaki Hayase, Masahiko Kaminishi, Kosuke Takahashi, Yu Sasaki | 2019-11-12 |