Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10519550 | Film formation apparatus | Hiroyuki Wada, Katsuyuki Hishiya | 2019-12-31 |
| 10438791 | Film forming method, film forming apparatus, and storage medium | Hideomi HANE, Kentaro Oshimo, Shimon Otsuki, Jun Ogawa, Noriaki Fukiage +2 more | 2019-10-08 |
| 10297443 | Semiconductor device manufacturing method and semiconductor device manufacturing system | Jun Ogawa | 2019-05-21 |