Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453692 | Location-specific tuning of stress to control bow to control overlay in semiconductor processing | Anton J. deVilliers | 2019-10-22 |
| 10431468 | Location-specific tuning of stress to control bow to control overlay in semiconductor processing | Anton J. deVilliers | 2019-10-01 |