Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10217616 | Method of controlling temperature and plasma processing apparatus | — | 2019-02-26 |
| 10192719 | Plasma processing method | Takamitsu TAKAYAMA, Hideaki Yakushiji | 2019-01-29 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10217616 | Method of controlling temperature and plasma processing apparatus | — | 2019-02-26 |
| 10192719 | Plasma processing method | Takamitsu TAKAYAMA, Hideaki Yakushiji | 2019-01-29 |