Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460950 | Substrate processing system and substrate processing method | Yoshinobu Hayakawa, Satoshi MIZUNAGA, Yasuhiro Hamada, Mitsuhiro Okada | 2019-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460950 | Substrate processing system and substrate processing method | Yoshinobu Hayakawa, Satoshi MIZUNAGA, Yasuhiro Hamada, Mitsuhiro Okada | 2019-10-29 |