Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10519549 | Apparatus for plasma atomic layer deposition | Tatsuya Matsumoto | 2019-12-31 |
| 10508338 | Device for atomic layer deposition | Tatsuya Matsumoto | 2019-12-17 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10519549 | Apparatus for plasma atomic layer deposition | Tatsuya Matsumoto | 2019-12-31 |
| 10508338 | Device for atomic layer deposition | Tatsuya Matsumoto | 2019-12-17 |