Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395940 | Method of etching microelectronic mechanical system features in a silicon wafer | Feng Zhou, Ki Wook Jung, Ercan Mehmet Dede, Kenneth E. Goodson | 2019-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395940 | Method of etching microelectronic mechanical system features in a silicon wafer | Feng Zhou, Ki Wook Jung, Ercan Mehmet Dede, Kenneth E. Goodson | 2019-08-27 |