Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10407299 | 3D MEMS device with hermetic cavity | — | 2019-09-10 |
| 10273147 | MEMS components and method of wafer-level manufacturing thereof | — | 2019-04-30 |
| 10214414 | Integrated MEMS system | Louis Ross | 2019-02-26 |