Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10249504 | Etching and mechanical grinding film-layers stacked on a semiconductor substrate | She Yu Tang, Tian Yi Zhang, Qin Xu Yu, Sheng-Pin Yang | 2019-04-02 |
| 10192732 | Contaminant removal in ultra-thin semiconductor device fabrication | Qin Xu Yu, Tian Yi Zhang | 2019-01-29 |