Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10340157 | Mini-environment apparatus | Tsutomu Okabe | 2019-07-02 |
| 10304702 | EFEM | Tsutomu Okabe | 2019-05-28 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10340157 | Mini-environment apparatus | Tsutomu Okabe | 2019-07-02 |
| 10304702 | EFEM | Tsutomu Okabe | 2019-05-28 |