Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504758 | Nozzle having real time inspection functions | Kai-Lin Chuang, Pei-Jung Chang, Chun-Wei Huang, Jun Liu | 2019-12-10 |
| 10490397 | Methods and systems for detection of ion spatial distribution | — | 2019-11-26 |