Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515833 | Wafer cleaning system and method | Kuo-Shu Tseng, You-Feng CHEN | 2019-12-24 |
| 10345716 | Metrology method in reticle transportation | Kuo-Shu Tseng, Yen-Yu Chen, Chun-Chih Lin, Yi-Ming Dai | 2019-07-09 |