Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508953 | Method and system for processing substrate by chemical solution in semiconductor manufacturing fabrication | Min-An Yang, Hao-Ming Chang, Shao-Chi Wei, Kuo-Chin Lin, Li-Chih Lu +1 more | 2019-12-17 |
| 10459332 | Mask blank and fabrication method thereof, and method of fabricating photomask | Hao-Ming Chang, Chih-Ming Chen, Cheng-Ming Lin, Shao-Chi Wei, Hsao Shih +1 more | 2019-10-29 |