Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10343895 | Micro-electro-mechanical system (MEMS) structure including isolation ring at sidewalls of semiconductor via and method for forming the same | Kai-Fung Chang, Lien-Yao Tsai | 2019-07-09 |
| 10266400 | MEMS device with multi pressure | Kai-Fung Chang, Lien-Yao Tsai | 2019-04-23 |