Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262878 | Fluorine contamination control in semiconductor manufacturing process | Li-Jung Liu, Chih-Pin Tsao, Chia-Wei Soong, Shu-Hui Wang, Shih-Hsun Chang | 2019-04-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262878 | Fluorine contamination control in semiconductor manufacturing process | Li-Jung Liu, Chih-Pin Tsao, Chia-Wei Soong, Shu-Hui Wang, Shih-Hsun Chang | 2019-04-16 |