Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522369 | Method and system for cleaning wafer and scrubber | Chien-Chun Hu, Chen Liang Chang, Po-Chia Chen, Shun-Yu Chuang, Wei-Tuzo Lin | 2019-12-31 |
| 10475643 | Deposition apparatus and method for manufacturing semiconductor device using the same | Ren-Hua Guo, Jen-Hao Yang | 2019-11-12 |