CN

Chun-Wen Nieh

TSMC: 1 patents #1,597 of 3,065Top 55%
Overall (2019): #509,521 of 560,194Top 95%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10269926 Purging deposition tools to reduce oxygen and moisture in wafers Yi-Ying Liu, Yu-Sheng Wang, Yu-Ting Lin, Wei-Yu Chen 2019-04-23