Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515861 | Method for calibrating temperature in chemical vapor deposition | Chih-Fen Chen, Tsung-Ying Liu, Yeh-Hsun Fang, Bang-Yu Huang | 2019-12-24 |
| 10325796 | Apparatus and system for detecting wafer damage | Yi-Feng James Chen, Yan Cing Lin | 2019-06-18 |
| 10319857 | Semiconductor device and manufacturing method thereof | Chih-Fen Chen, Ching Yu, Pin-Hen Lin, Yen Chuang, Yuh-Ta Fan | 2019-06-11 |