Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10494716 | Apparatus and method for spatial atomic layer deposition | Anthony Hong Lin, Pei-Ren Jeng, Tze-Liang Lee | 2019-12-03 |
| 10269599 | Semiconductor manufacturing apparatus | Chao-Tzung Tsai, Tzu Ken Lin, I-Chang Wu, Li-Jia Liou | 2019-04-23 |