Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10443127 | System and method for supplying a precursor for an atomic layer deposition (ALD) process | Bor Chiuan Hsieh, Tai-Chun Huang, Kuang-Yuan Hsu, Tze-Liang Lee | 2019-10-15 |