Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10365672 | Method and system for monitoring temperature of wafer | Shu-Han Chen, Sheng-Hung Lin, Han-Hsuan Hsu | 2019-07-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10365672 | Method and system for monitoring temperature of wafer | Shu-Han Chen, Sheng-Hung Lin, Han-Hsuan Hsu | 2019-07-30 |