Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522385 | Wafer table with dynamic support pins | Min-Cheng Wu | 2019-12-31 |
| 10514607 | Radiation source supply system for lithographic tools | Yueh-Lin Yang | 2019-12-24 |
| 10509321 | Temperature controlling apparatus and method for forming coating layer | Wei Chang Cheng | 2019-12-17 |
| 10473021 | Exhaust system and method of using | Wei Chang Cheng, Ping-Hsu Chen, T. S. Lo, Yung-Yao Lee | 2019-11-12 |
| 10464032 | System and method for providing deionized water with dynamic electrical resistivity | Wei Chang Cheng, Chien-Hung Wang | 2019-11-05 |