Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475700 | Etching to reduce line wiggling | Kuan-Wei Huang, Yu-Yu Chen | 2019-11-12 |
| 10347506 | Multiple patterning method using mask portions to etch semiconductor substrate | Chih-Hao Chen, Wen-Yen Chen | 2019-07-09 |