Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10279311 | System and method for operating chemical mechanical polishing process | Chih-I Peng, Hsiang-Pi Chang, Teng-Chun Tsai, Kuo-Yin Lin, Chih-Yuan Yang | 2019-05-07 |
| 10190235 | Wafer supporting structure and method for forming the same | An-Li Ho, Chi-En Huang, Yi Jia Chen, Pu Chen | 2019-01-29 |