Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10247539 | Two-channel point-diffraction interferometer | Mariia Voznesenskaia, Tatiana Voznesenskaia | 2019-04-02 |
| 10204197 | Coupled-domains disturbance matrix generation for fast simulation of wafer topography proximity effects | Ralf Juengling | 2019-02-12 |