Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490437 | Susceptor, vapor deposition apparatus, vapor deposition method and epitaxial silicon wafer | Daisuke HIEDA, Tatsuo Kusumoto | 2019-11-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490437 | Susceptor, vapor deposition apparatus, vapor deposition method and epitaxial silicon wafer | Daisuke HIEDA, Tatsuo Kusumoto | 2019-11-26 |