Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10304996 | Semiconductor light-emitting apparatus having wavelength-converting structure with uneven top surface and its manufacturing method | Takayoshi YAMANE | 2019-05-28 |
| 10290516 | Substrate processing apparatus, maintenance method, and maintenance program | Akihiko Yoneda, Yasuhiro MIZUGUCHI | 2019-05-14 |
| 10269603 | Substrate processing apparatus, gas-purging method, method for manufacturing semiconductor device, and recording medium containing abnormality-processing program | Yoshihiko Nakagawa | 2019-04-23 |