Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10280084 | Silicon nitride film and method of making thereof | Shoichi Murakami, Masayasu Hatashita, Masaya Yamawaki | 2019-05-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10280084 | Silicon nitride film and method of making thereof | Shoichi Murakami, Masayasu Hatashita, Masaya Yamawaki | 2019-05-07 |