Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488761 | Exposure apparatus, surface position control method, exposure method, and semiconductor device manufacturing method | — | 2019-11-26 |
YK
Yoshimitsu Kato
Overall (2019): #211,061 of 560,194Top 40%
1
Patents 2019