Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522966 | Laser apparatus | — | 2019-12-31 |
| 10466414 | Grating, method for manufacturing grating, and method for recycling grating | Osamu Wakabayashi | 2019-11-05 |
| 10205297 | Narrow band excimer laser apparatus | Osamu Wakabayashi | 2019-02-12 |