Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10189142 | Method for polishing a semiconductor wafer | Klaus Roettger, Alexander Heilmaier, Makoto Tabata, Vladimir Dutschke, Torsten Olbrich | 2019-01-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10189142 | Method for polishing a semiconductor wafer | Klaus Roettger, Alexander Heilmaier, Makoto Tabata, Vladimir Dutschke, Torsten Olbrich | 2019-01-29 |